Invention Grant
US09437466B2 Storage container, shutter opening/closing unit of storage container, and wafer stocker using storage container and shutter opening/closing unit
有权
储存容器,储存容器的开闭器开闭单元,以及使用储存容器和快门打开/关闭单元的晶片储盘器
- Patent Title: Storage container, shutter opening/closing unit of storage container, and wafer stocker using storage container and shutter opening/closing unit
- Patent Title (中): 储存容器,储存容器的开闭器开闭单元,以及使用储存容器和快门打开/关闭单元的晶片储盘器
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Application No.: US14513979Application Date: 2014-10-14
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Publication No.: US09437466B2Publication Date: 2016-09-06
- Inventor: Fumio Sakiya , Katsunori Sakata
- Applicant: RORZE CORPORATION
- Applicant Address: JP Fukuyama-Shi, Hiroshima
- Assignee: RORZE CORPORATION
- Current Assignee: RORZE CORPORATION
- Current Assignee Address: JP Fukuyama-Shi, Hiroshima
- Agent Manabu Kanesaka
- Priority: JP2012-093247 20120416
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/67 ; H01L21/673 ; B25J11/00 ; E05F15/10 ; E05F15/20

Abstract:
Provided is a wafer stocker that can prevent the inflow of an external atmosphere, maintain a wafer storage space at a desired atmosphere with a relatively small amount of gas, and prevent dust from being attached to a wafer surface. A shutter portion, including multiple shield plates having the same height as an interval between shelf plates disposed in a storage container, is disposed with a slight space from a body portion, and by supplying clean gas into the storage container, a clean atmosphere of a higher pressure than an external environment is maintained, and a shutter portion is opened and closed by moving up and down the shield plate independently from the shelf plate that supports a wafer.
Public/Granted literature
Information query
IPC分类: