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US09437506B2 Semiconductor defect characterization 有权
半导体缺陷表征

Semiconductor defect characterization
Abstract:
The defect-containing die identified from an inspection layer analysis subsequent to a manufacturing step for a wafer including a plurality of die and as well as the faulty die identified from a fault testing of the wafer are processed to identify a subset of the die that both contain a defect and are faulty. A probability analysis is performed to determine a confidence level of whether the die in the subset are faulty due to their defects.
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