Invention Grant
- Patent Title: Semiconductor device
- Patent Title (中): 半导体器件
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Application No.: US14690982Application Date: 2015-04-20
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Publication No.: US09437544B2Publication Date: 2016-09-06
- Inventor: Katsumi Sameshima
- Applicant: ROHM CO., LTD.
- Applicant Address: JP Kyoto
- Assignee: ROHM CO., LTD.
- Current Assignee: ROHM CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Rabin & Berdo, P.C.
- Priority: JP2007-298361 20071116
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/528 ; H01L23/525 ; H01L23/00 ; H01L23/31

Abstract:
A semiconductor device includes a semiconductor chip, a wiring on the chip, an insulating film coating the wiring and having an opening partially exposing the wiring, a Ti/W film on a portion of the wiring facing the opening, a Cu layer on the Ti/W film and the wiring's exposed portion, and having a peripheral edge protruding away from the opening more than Ti/W film's peripheral edge in parallel to an insulating film surface, and a solder ball bonded to the Cu layer. The protrusion of the Cu layer's peripheral edge with respect to the Ti/W film's peripheral edge is greater than the Ti/W film's thickness. The Ti/W film's surface doesn't vertically surpass the Cu layer's upper surface in the opening's center. A Cu layer/solder ball interface is arc-shaped on both sides of the Cu layer's upper surface in a cross section taken perpendicularly to the Cu layer's upper surface.
Public/Granted literature
- US20150228575A1 SEMICONDUCTOR DEVICE Public/Granted day:2015-08-13
Information query
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