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US09437575B1 Semiconductor device package formed in a chip-on-wafer last process using thin film adhesives 有权
半导体器件封装形成在使用薄膜粘合剂的晶片上最后工艺中

Semiconductor device package formed in a chip-on-wafer last process using thin film adhesives
Abstract:
Methods for a semiconductor device package formed in a chip-on-wafer last process using thin film adhesives are disclosed and may include bonding a first carrier to a first surface of an interposer in wafer form, forming conductive bumps on a second surface of the interposer, bonding a second carrier to the conductive bumps utilizing a film adhesive, removing the first carrier from the interposer, bonding a semiconductor die to the first surface of the interposer, and encapsulating the die and the first surface of the interposer in an encapsulant material. The second carrier and the film adhesive may be removed from the conductive bumps utilizing a slide-off process. The interposer and encapsulant may be diced into a plurality of interposer and die structures. One of the die and interposer structures may be bonded to a substrate. The die may be bonded to the interposer utilizing a mass reflow process.
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