Invention Grant
- Patent Title: Barrier trench structure and methods of manufacture
- Patent Title (中): 阻隔沟槽结构和制造方法
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Application No.: US14686972Application Date: 2015-04-15
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Publication No.: US09437595B2Publication Date: 2016-09-06
- Inventor: Brent A. Anderson , Andres Bryant , Edward J. Nowak , Jed H. Rankin
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon
- Agent Michael LeStrange; Andrew M. Calderon
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L21/762 ; H01L21/84 ; H01L27/12 ; H01L21/8234 ; H01L29/06

Abstract:
A structure includes at least one shallow trench isolation structure formed in a substrate to isolate adjacent different type devices. The structure further includes a barrier trench structure formed in the substrate to isolate diffusions of adjacent same type devices. The structure further includes a material spanning the barrier trench structure to connect the diffusions of the adjacent same type device, on a same level as the adjacent same type devices.
Public/Granted literature
- US20150221646A1 BARRIER TRENCH STRUCTURE AND METHODS OF MANUFACTURE Public/Granted day:2015-08-06
Information query
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