Invention Grant
US09437645B1 Composite grid structure to reduce cross talk in back side illumination image sensors
有权
复合网格结构,减少背面照明图像传感器的串扰
- Patent Title: Composite grid structure to reduce cross talk in back side illumination image sensors
- Patent Title (中): 复合网格结构,减少背面照明图像传感器的串扰
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Application No.: US14663918Application Date: 2015-03-20
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Publication No.: US09437645B1Publication Date: 2016-09-06
- Inventor: Keng-Yu Chou , Chun-Hao Chuang , Chien-Hsien Tseng , Shyh-Fann Ting , Wei-Chieh Chiang , Yuichiro Yamashita
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Associates, LLC
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A semiconductor structure for back side illumination (BSI) pixel sensors is provided. Photodiodes are arranged within a semiconductor substrate. A composite grid includes a metal grid and a low refractive index (low-n) grid. The metal grid includes first openings overlying the semiconductor substrate and corresponding to ones of the photodiodes. The low-n grid includes second openings overlying the semiconductor substrate and corresponding to ones of the photodiodes. Color filters are arranged in the first and second openings of the corresponding photodiodes and have a refractive index greater than a refractive index of the low-n grid. Upper surfaces of the color filters are offset relative to an upper surface of the composite grid. A method for manufacturing the BSI pixel sensors is also provided.
Public/Granted literature
- US20160276395A1 Composite Grid Structure to Reduce Cross Talk in Back Side Illumination Image Sensors Public/Granted day:2016-09-22
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