Invention Grant
- Patent Title: Layer system
- Patent Title (中): 层系统
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Application No.: US14507389Application Date: 2014-10-06
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Publication No.: US09437676B2Publication Date: 2016-09-06
- Inventor: Christoph Wilbertz , Dominik Zimmermann
- Applicant: Micronas GmbH
- Applicant Address: DE Freiburg
- Assignee: Micronas GmbH
- Current Assignee: Micronas GmbH
- Current Assignee Address: DE Freiburg
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: DE102013016330 20131005
- Main IPC: G11B5/72
- IPC: G11B5/72 ; H01L29/06 ; G01N27/414
Abstract:
A layer system having a layer region whereby the layer region has a single-crystal silicon substrate with a front side and a back side, and whereby a textured surface is formed on the front side and the textured surface has a topography with different heights and a thin film layer of a metal oxide and/or an oxide ceramic is formed on the textured surface, whereby the thin film layer covers the textured surface.
Public/Granted literature
- US20150096353A1 LAYER SYSTEM Public/Granted day:2015-04-09
Information query
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