Invention Grant
- Patent Title: Semiconductor device
- Patent Title (中): 半导体器件
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Application No.: US14640566Application Date: 2015-03-06
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Publication No.: US09437700B2Publication Date: 2016-09-06
- Inventor: Satoru Machida , Yusuke Yamashita , Koichi Nishikawa , Masaru Senoo , Jun Okawara , Yoshifumi Yasuda , Hiroshi Hosokawa , Yasuhiro Hirabayashi
- Applicant: KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO , TOYOTA JIDOSHA KABUSHIKI KAISHA
- Applicant Address: JP Nagakute JP Toyota
- Assignee: KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO,TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee: KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO,TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee Address: JP Nagakute JP Toyota
- Agency: Oliff PLC
- Priority: JP2014-063289 20140326
- Main IPC: H01L29/45
- IPC: H01L29/45 ; H01L29/78 ; H01L29/739 ; H01L29/423 ; H01L29/16 ; H01L23/00

Abstract:
A semiconductor device is provided with a silicon layer, an upper surface side aluminum layer containing silicon and an insulation film. The upper surface side aluminum layer contacts and is layered on a part of a surface of the silicon layer. The insulation film contacts and is layered on another part of the surface of the silicon layer. The insulation film is adjacent to and contacts the upper surface side aluminum layer. The insulation film includes an insulation film body and a plurality of first nodule segregated portions projecting from the insulation film body toward the upper surface side aluminum layer as seen along a vertical direction relative to the surface of the silicon layer. A corner is formed by a side surface of the insulation film body and a side surface of each of the first nodule segregated portions as seen along the vertical direction.
Public/Granted literature
- US20150279953A1 SEMICONDUCTOR DEVICE Public/Granted day:2015-10-01
Information query
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