Invention Grant
- Patent Title: Semiconductor device comprising a graphene wire
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Application No.: US14803751Application Date: 2015-07-20
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Publication No.: US09437716B2Publication Date: 2016-09-06
- Inventor: Makoto Wada , Yuichi Yamazaki , Akihiro Kajita , Atsunobu Isobayashi , Tatsuro Saito
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Tokyo
- Agency: Holtz, Holtz & Volek PC
- Priority: JP2012-208669 20120921
- Main IPC: H01L29/66
- IPC: H01L29/66 ; B82Y30/00 ; H01L23/528 ; H01L23/532 ; C01B31/04

Abstract:
According to one embodiment, a semiconductor device includes a catalyst underlying layer formed on a substrate including semiconductor elements formed thereon and processed in a wiring pattern, a catalyst metal layer that is formed on the catalyst underlying layer and whose width is narrower than that of the catalyst underlying layer, and a graphene layer growing with a sidewall of the catalyst metal layer set as a growth origin and formed to surround the catalyst metal layer.
Public/Granted literature
- US20150325524A1 SEMICONDUCTOR DEVICE COMPRISING A GRAPHENE WIRE Public/Granted day:2015-11-12
Information query
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