Invention Grant
- Patent Title: Semiconductor-on-insulator (SOI) lateral heterojunction bipolar transistor having a wide band gap emitter/collector which are epitaxially grown
-
Application No.: US14709579Application Date: 2015-05-12
-
Publication No.: US09437718B1Publication Date: 2016-09-06
- Inventor: Jin Cai , Kevin K. Chan , Tak H. Ning , Jeng-Bang Yau , Joonah Yoon
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Louis J. Percello, Esq.
- Main IPC: H01L29/16
- IPC: H01L29/16 ; H01L29/737 ; H01L29/66 ; H01L29/08 ; H01L29/06 ; H01L29/161 ; H01L29/165 ; H01L21/02 ; H01L29/735
Abstract:
A method of forming a semiconductor structure includes forming a first seed layer, a second seed layer and an intrinsic base spaced apart from each other and with the intrinsic base located between the first seed layer and the second seed layer on an insulator layer. The method further includes forming an emitter on the first seed layer and on a first vertical surface of the intrinsic base by epitaxially growing the emitter from the first seed layer and the first vertical surface of the intrinsic base, and forming a collector on the second seed layer and on a second vertical surface of the intrinsic base by epitaxially growing the collector from the second seed layer and the second vertical surface of the intrinsic base.
Information query
IPC分类:
