Invention Grant
- Patent Title: Field effect transistor with heterostructure channel
- Patent Title (中): 具有异质结构通道的场效应晶体管
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Application No.: US14175341Application Date: 2014-02-07
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Publication No.: US09437738B2Publication Date: 2016-09-06
- Inventor: Chien-Ming Lin
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, P.C. Intellectual Property Attorneys
- Agent Anthony King
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/78 ; H01L29/165 ; H01L29/205 ; H01L29/66 ; H01L29/775 ; H01L29/423 ; B82Y10/00

Abstract:
In some embodiments, an FET structure comprises a heterostructure, and a gate structure. The heterostructure comprises a first section, a barrier section and a second section such that a portion of the first section, the barrier section, and a portion of the second section form a channel region, and portions of the first section and the second section on opposite sides of the channel region form at least portions of source and drain regions, respectively. When the channel region is p type, the barrier section has a positive valence band offset with respect to each of the first section and the second section, or when the channel region is n type, the barrier section has a positive conduction band offset with respect to each of the first section and the second section. A gate structure is configured over the channel region.
Public/Granted literature
- US20150228782A1 FIELD EFFECT TRANSISTOR WITH HETEROSTRUCTURE CHANNEL Public/Granted day:2015-08-13
Information query
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