Invention Grant
US09437794B2 Method of fabricating a flip chip light emitting diode (FCLED) die having N-conductor layer 有权
制造具有N导体层的倒装芯片发光二极管(FCLED)裸片的方法

Method of fabricating a flip chip light emitting diode (FCLED) die having N-conductor layer
Abstract:
A method for fabricating a flip chip light emitting diode (FCLED) die includes forming an epitaxial stack on a carrier substrate having an n-type confinement layer, a multiple quantum well (MQW) layer, and a p-type confinement layer, forming a mirror layer on the p-type confinement layer, forming an n-trench in the n-type confinement layer, forming an n-conductor layer in the n-trench on the n-type confinement layer, forming a p-metal layer on the p-type confinement layer, forming a first electrical isolator layer on the n-conductor layer and a second electrical isolator layer on the p-metal layer, forming a p-pad on the first electrical isolator layer, and forming an n-pad the second electrical isolator layer.
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