Invention Grant
- Patent Title: Polishing apparatus and polishing method
- Patent Title (中): 抛光设备和抛光方法
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Application No.: US13859496Application Date: 2013-04-09
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Publication No.: US09440327B2Publication Date: 2016-09-13
- Inventor: Yasumasa Hiroo , Yoichi Kobayashi , Katsutoshi Ono
- Applicant: Ebara Corporation
- Applicant Address: JP Tokyo
- Assignee: Ebara Corporation
- Current Assignee: Ebara Corporation
- Current Assignee Address: JP Tokyo
- Agency: Baker & Hostetler LLP
- Priority: JP2012-89585 20120410
- Main IPC: B24B1/00
- IPC: B24B1/00 ; B24B49/10 ; B24B49/12 ; B24B49/16 ; B24B37/013

Abstract:
The present invention provides an apparatus and a method for polishing a substrate having a film formed thereon. The method includes: rotating a polishing table supporting a polishing pad by a table motor; pressing the substrate against the polishing pad by a top ring; obtaining a signal containing a thickness information of the film; producing from the signal a polishing index value that varies in accordance with a thickness of the film; monitoring a torque current value of the table motor and the polishing index value; and determining a polishing end point based on a point of time when the torque current value has reached a predetermined threshold value or a point of time when a predetermined distinctive point of the polishing index value has appeared, whichever comes first.
Public/Granted literature
- US20130344773A1 POLISHING APPARATUS AND POLISHING METHOD Public/Granted day:2013-12-26
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