Invention Grant
US09440331B2 Polishing sheet and polishing tool 有权
抛光板和抛光工具

Polishing sheet and polishing tool
Abstract:
A polishing sheet comprising a plurality of convex portions which protrudes from a sheet surface and includes an upper surface which is in parallel to the sheet surface is disclosed. A plurality of abrasive grains made by a granular porous body in which a number of primary particles are partially bonded to each other and include a void in between is arranged at least on the upper surface of the convex portion.
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