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US09440939B2 Norbornene derivative 有权
降冰片烯衍生物

Norbornene derivative
Abstract:
A novel compound useful as a raw material for a resist material is described. A norbornene derivative having epoxy and a methylene-mediated reactive group in a norbornane skeleton is represented by the following formula. In the formula, R1 represents a hydrogen atom, acryloyl, methacryloyl or hydroxymethylacryloyl, and R2 represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms.
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