Invention Grant
US09441288B2 Mask for thin film deposition and method of manufacturing OLED using the same 有权
用于薄膜沉积的掩模和使用其制造OLED的方法

Mask for thin film deposition and method of manufacturing OLED using the same
Abstract:
A mask for thin film deposition used in forming an organic thin film or a conductive layer in an organic light emitting device is disclosed. In one embodiment, the mask includes i) a base member, ii) a plurality of slits configured to penetrate through the base member, wherein the plurality of slits have a predetermined length and extend in a first direction, wherein the plurality of slits comprise an outermost slit positioned in an outermost in a second direction having a predetermined angle with respect to the first direction, and wherein the outermost slit comprises two sub-slits separated from each other and iii) a rib supporting part formed between and contacting the two sub-slits, wherein the rib supporting part extends from a rib which is adjacent to the outermost slit.
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