Invention Grant
- Patent Title: Calibration method and shape measuring apparatus
- Patent Title (中): 校准方法和形状测量仪器
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Application No.: US14543700Application Date: 2014-11-17
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Publication No.: US09441959B2Publication Date: 2016-09-13
- Inventor: Toshinori Nagahashi
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Maschoff Brennan
- Priority: JP2013-238114 20131118
- Main IPC: G01B11/24
- IPC: G01B11/24 ; G01B11/25

Abstract:
A calibration method includes acquiring a captured image of a lattice fringe by providing a reference gauge having a reference surface whose height from a reference plane changes in a first direction, projecting a fringe pattern having the same phase along the first direction with respect to the reference surface and having a phase changing in a second direction crossing the first direction, and imaging the fringe pattern; calculating a phase of each pixel along the first direction in the captured image of the fringe pattern; and generating relational data in which the height of the reference surface corresponding to the pixel, the phase calculated with respect to the pixel, and a period of the fringe pattern at the time of calculating the phase are associated with each other.
Public/Granted literature
- US20150138565A1 CALIBRATION METHOD AND SHAPE MEASURING APPARATUS Public/Granted day:2015-05-21
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