Invention Grant
US09442131B2 System and method for run-time hermeticity detection of a capped MEMS device
有权
封装MEMS器件的运行时密封性检测系统和方法
- Patent Title: System and method for run-time hermeticity detection of a capped MEMS device
- Patent Title (中): 封装MEMS器件的运行时密封性检测系统和方法
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Application No.: US13799382Application Date: 2013-03-13
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Publication No.: US09442131B2Publication Date: 2016-09-13
- Inventor: Matthew Aaron Hazel , James Wilson , Colm Prendergast , Daniel Boyko , Benoit Dufort
- Applicant: Analog Devices, Inc.
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Sunstein Kann Murphy & Timbers LLP
- Main IPC: G01P21/00
- IPC: G01P21/00 ; G01P15/125

Abstract:
Determining if a hermetically sealed MEMs device loses hermeticity during operation. In one embodiment, the MEMs device is an accelerometer. A test signal having an associated frequency above an operational frequency range for the accelerometer is provided to the accelerometer at an input during operation of the accelerometer for sensing an acceleration. The output signal of the accelerometer is filtered at least above the operational frequency range of the accelerometer producing a test output signal. The test output signal is then compared to a predetermined threshold to determine if the amplitude of the test output signal differs from the threshold. If the amplitude of the test output signal differs from the predetermined threshold, an error signal is produced indicating that hermeticity of the accelerometer has been lost.
Public/Granted literature
- US20140260515A1 System and Method for Run-Time Hermeticity Detection of a Capped MEMS Device Public/Granted day:2014-09-18
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