Invention Grant
- Patent Title: Spaced configuration of acousto-optic deflectors for laser beam scanning of a semiconductor substrate
- Patent Title (中): 用于半导体衬底的激光束扫描的声光偏转器的间隔配置
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Application No.: US13997646Application Date: 2011-12-22
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Publication No.: US09442286B2Publication Date: 2016-09-13
- Inventor: Yonggang Li , Islam A. Salama , Chong Zhang
- Applicant: Yonggang Li , Islam A. Salama , Chong Zhang
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- International Application: PCT/US2011/067001 WO 20111222
- International Announcement: WO2013/095556 WO 20130627
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02F1/29 ; G02F1/33 ; G02B26/10
Abstract:
A first acousto-optic deflector receives a laser beam. The first acousto-optic deflector diffracts the received laser beam along a first axis. A second acousto-optic deflector receives the diffracted laser beam. The second acousto-optic deflector diffracts the received diffracted laser beam along a second axis.
Public/Granted literature
- US20140204454A1 CONFIGURATION OF ACOUSTO-OPTIC DEFLECTORS FOR LASER BEAM SCANNING Public/Granted day:2014-07-24
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