Invention Grant
- Patent Title: Manufacturing control apparatus and manufacturing control system
- Patent Title (中): 制造控制装置及制造控制系统
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Application No.: US13835117Application Date: 2013-03-15
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Publication No.: US09442483B2Publication Date: 2016-09-13
- Inventor: Linting Huang
- Applicant: Kabushiki Kaisha Toshiba
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2012-134282 20120613
- Main IPC: G05B23/02
- IPC: G05B23/02 ; G05B13/02 ; G06F17/16 ; G06F17/18 ; H01L21/67 ; H01L21/66 ; G05B19/418

Abstract:
A manufacturing control apparatus of an electronic device is configured to implement processing to generate a first model function relating to a relationship between a characteristic of a component included in the electronic device. The apparatus is configured to implement processing to determine a first manufacturing condition value to obtain the characteristic of the component based on the first model function. The apparatus is configured to implement processing to calculate a squared prediction error of a measured value of the characteristic of the component. The apparatus is configured to implement processing to determine a second manufacturing condition value of the next electronic device according to the calculated squared prediction error.
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