- Patent Title: Compensation of dose inhomogeneity using overlapping exposure spots
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Application No.: US14726243Application Date: 2015-05-29
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Publication No.: US09443052B2Publication Date: 2016-09-13
- Inventor: Elmar Platzgummer , Rafael Reiter
- Applicant: IMS Nanofabrication AG
- Applicant Address: AT Vienna
- Assignee: IMS Nanofabrication AG
- Current Assignee: IMS Nanofabrication AG
- Current Assignee Address: AT Vienna
- Agency: KPPB LLP
- Priority: EP14170611 20140530
- Main IPC: G06F17/50
- IPC: G06F17/50 ; H01J37/304 ; H01J37/317

Abstract:
An exposure pattern is computed which is used for exposing a desired pattern on a target by means of a particle beam and a blanking aperture array in a particle-optical lithography apparatus, taking into account a non-uniform current dose distribution as generated by the beam over the positions of the apertures of the blanking aperture array: From the desired pattern a nominal exposure pattern is calculated as a raster graphics comprising nominal dose values for the pixels of the raster graphics; based on a map of the current dose distribution, which correlates each aperture with a current factor describing the current dose of the beam at the location of the aperture, a compensated dose value is calculated for each pixel; and for each pixel, a discrete value is determined by selecting a value from a discrete gray scale so as to approximate the compensated dose value.
Public/Granted literature
- US09495499B2 Compensation of dose inhomogeneity using overlapping exposure spots Public/Granted day:2016-11-15
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