Invention Grant
- Patent Title: Dual trench rectifier and method for forming the same
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Application No.: US14746248Application Date: 2015-06-22
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Publication No.: US09443846B2Publication Date: 2016-09-13
- Inventor: Qinhai Jin
- Applicant: CHIP INTEGRATION TECH. CO., LTD. , Qinhai Jin
- Applicant Address: TW Zhubei, Hsinchu County TW Zhubei, Hsinchu County
- Assignee: CHIP INTEGRATION TECH. CO., LTD.,Qinhai Jin
- Current Assignee: CHIP INTEGRATION TECH. CO., LTD.,Qinhai Jin
- Current Assignee Address: TW Zhubei, Hsinchu County TW Zhubei, Hsinchu County
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: H01L29/45
- IPC: H01L29/45 ; H01L27/08 ; H01L29/78 ; H01L29/06 ; H01L29/47 ; H01L29/861 ; H01L29/872 ; H01L29/40 ; H01L29/66

Abstract:
A structure of dual trench rectifier comprises of the following elements. A plurality of trenches are formed parallel in an n− epitaxial layer on an n+ semiconductor substrate and spaced with each other by a mesa. A plurality of recesses are formed on the mesas. Each the trench has a trench oxide layer formed on the sidewalls and bottom thereof, and a first poly silicon layer is filled therein to form MOS structures. Each the recess has a recess oxide layer formed on the sidewalls and bottom thereof, and a second poly silicon layer is filled therein to form MOS structures. A plurality of p type bodies are formed at two sides of the MOS structures in recesses. A top metal is formed above the semiconductor substrate for serving as an anode. A bottom metal is formed beneath the semiconductor substrate for serving as a cathode.
Public/Granted literature
- US20150287720A1 DUAL TRENCH RECTIFIER AND METHOD FOR FORMING THE SAME Public/Granted day:2015-10-08
Information query
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