Invention Grant
- Patent Title: Spectroscopic sensor and method for manufacturing same
- Patent Title (中): 光谱传感器及其制造方法
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Application No.: US14219477Application Date: 2014-03-19
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Publication No.: US09443993B2Publication Date: 2016-09-13
- Inventor: Noriyuki Nakamura , Terunao Hanaoka , Kunihiko Yano
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2013-068320 20130328; JP2013-071594 20130329
- Main IPC: H01L31/0216
- IPC: H01L31/0216 ; H01L31/02 ; A61B5/1455

Abstract:
A method for manufacturing a spectroscopic sensor includes: (a) forming a light receiving element on a semiconductor substrate; (b) forming an angle restricting filter on the semiconductor substrate; and (c) forming a spectroscopic filter on the angle restricting filter. The step (c) of forming a spectroscopic filter includes: (c1) forming a first light transmitting film having a peripheral edge that overlaps a light blocking portion in plan view ox the semiconductor substrate by a lift-off method; and (c2) forming a second light transmitting film at a position spaced apart from the first light transmitting film in plan view of the semiconductor substrate by the lift-off method, the second light transmitting film having a peripheral edge that overlaps the light blocking portion in plan view of the semiconductor substrate.
Public/Granted literature
- US20140295610A1 SPECTROSCOPIC SENSOR AND METHOD FOR MANUFACTURING SAME Public/Granted day:2014-10-02
Information query
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