Invention Grant
US09444223B2 Surface-emitting semiconductor laser device and method for producing the same 有权
表面发射半导体激光器件及其制造方法

Surface-emitting semiconductor laser device and method for producing the same
Abstract:
Provided is a surface-emitting semiconductor laser device including a substrate; a semiconductor layer formed on the substrate, the semiconductor layer including a first semiconductor multilayer film of a first conductivity type, an active region, and a second semiconductor multilayer film of a second conductivity type, the first semiconductor multilayer film and the second semiconductor multilayer film forming a cavity; and an oxidation-resistant structure including a groove formed along at least a portion of an outer periphery of the semiconductor layer and an oxidation-resistant portion formed on a surface of the groove.
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