Invention Grant
US09444403B2 Resonation element, resonator, oscillator, electronic device and moving object
有权
谐振元件,谐振器,振荡器,电子器件和移动物体
- Patent Title: Resonation element, resonator, oscillator, electronic device and moving object
- Patent Title (中): 谐振元件,谐振器,振荡器,电子器件和移动物体
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Application No.: US14836354Application Date: 2015-08-26
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Publication No.: US09444403B2Publication Date: 2016-09-13
- Inventor: Akinori Yamada
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2014-183733 20140909
- Main IPC: H03B5/30
- IPC: H03B5/30 ; H03H9/10 ; H03H9/24 ; H03H9/02

Abstract:
A resonation element includes a basal portion, resonating arms extending out in a Y-axis direction from the basal portion, and a vibration substrate, formed of single crystal silicon, in which a Z-axis direction is set to a thickness direction, and is configured such that the resonating arms are flexurally vibrated in an XY in-plane direction. In addition, when resonation frequencies of the resonating arms are set to F [kHz], widths of the resonating arms are set to W [μm], and lengths of the resonating arms are set to L [μm], at least one expression of the following Expression (1) and the following Expression (2) is satisfied. W
Public/Granted literature
- US20160072474A1 RESONATION ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC DEVICE AND MOVING OBJECT Public/Granted day:2016-03-10
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