Invention Grant
US09445025B2 System, method, and product for imaging probe arrays with small feature sizes 有权
用于成像具有小特征尺寸的探针阵列的系统,方法和产品

System, method, and product for imaging probe arrays with small feature sizes
Abstract:
An embodiment of a method for resolving features on a probe array is described that, comprises acquiring a plurality of micro-shifted images of a region of a probe array; reconstructing an image of the probe array using the micro-shifted images; and deriving intensity values for one or more probe features disposed on the probe array from the reconstructed image.
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