Invention Grant
- Patent Title: Rotary conveying equipment for exposing substrate
- Patent Title (中): 用于曝光基材的旋转输送设备
-
Application No.: US13658169Application Date: 2012-10-23
-
Publication No.: US09445505B2Publication Date: 2016-09-13
- Inventor: Wei-Lin Liu
- Applicant: APONE TECHNOLOGY LTD.
- Agency: Meagher Emanuel Laks Goldberg & Liao, LLP
- Priority: TW101125310A 20120713
- Main IPC: B23Q1/25
- IPC: B23Q1/25 ; H05K3/00
Abstract:
Disclosed is a rotary conveying equipment for exposing a substrate. The rotary conveying equipment includes a carrying device and a rotary moving device. The carrying device carries the substrate by fastening the substrate thereon. The rotary moving device includes a rotating means, and the rotating means is connected to the carrying device and is moved together while rotated. And the efficiency of the exposure process is improved.
Public/Granted literature
- US20140015183A1 Rotary Conveying Equipment for Exposing Substrate Public/Granted day:2014-01-16
Information query
