Invention Grant
US09446910B2 Substrate transfer robot, substrate transfer system, and method for transferring substrate
有权
基板传送机器人,基板传送系统和传送基板的方法
- Patent Title: Substrate transfer robot, substrate transfer system, and method for transferring substrate
- Patent Title (中): 基板传送机器人,基板传送系统和传送基板的方法
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Application No.: US14285565Application Date: 2014-05-22
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Publication No.: US09446910B2Publication Date: 2016-09-20
- Inventor: Yoshiki Kimura , Daisuke Shin
- Applicant: KABUSHIKI KAISHA YASKAWA DENKI
- Applicant Address: JP Kitakyushu-Shi
- Assignee: KABUSHIKI KAISHA YASKAWA DENKI
- Current Assignee: KABUSHIKI KAISHA YASKAWA DENKI
- Current Assignee Address: JP Kitakyushu-Shi
- Agency: Mori & Ward, LLP
- Priority: JP2013-108413 20130522
- Main IPC: G06F7/00
- IPC: G06F7/00 ; B65G47/90 ; B25J9/04 ; H01L21/67 ; H01L21/677 ; B25J9/16

Abstract:
A substrate transfer robot includes a hand to approach a substrate storage on which a substrate is placed, and to hold the substrate. An arm moves the hand. A controller controls a position and orientation of the hand. When in plan view, a substrate holding center at a time when the hand is holding the substrate is adjacent to the substrate storage and is at an access start position at a predetermined distance from the substrate storage, the substrate holding center reaches a substrate placement position in the substrate storage with a hand center line inclined toward an access straight line and with the hand holding center overlapping the access straight line. The hand center line is oriented from a base to a distal end of the hand. The access straight line is perpendicular to a front surface of the substrate storage and associated with the hand approaching the substrate storage.
Public/Granted literature
- US20140350714A1 SUBSTRATE TRANSFER ROBOT, SUBSTRATE TRANSFER SYSTEM, AND METHOD FOR TRANSFERRING SUBSTRATE Public/Granted day:2014-11-27
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