Invention Grant
US09446942B2 Electronic part, electronic apparatus, and moving object 有权
电子部件,电子设备和移动物体

Electronic part, electronic apparatus, and moving object
Abstract:
An electronic part includes a bottom portion of a cavity that has an oscillation device, a ceiling portion so disposed that it faces the bottom portion via the cavity and having holes, a shielding portion that is disposed in the cavity and between the bottom portion of the cavity and the ceiling portion and covers the holes in a plan view viewed in the direction in which the bottom portion of the cavity and the ceiling portion are arranged, and sealing portions that are connected to both the ceiling portion and the shielding portion via the holes and seal the holes.
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