Invention Grant
- Patent Title: Wafer-level packaging of integrated devices, and manufacturing method thereof
- Patent Title (中): 集成器件的晶圆级封装及其制造方法
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Application No.: US14288130Application Date: 2014-05-27
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Publication No.: US09446943B2Publication Date: 2016-09-20
- Inventor: Kevin Formosa , Luca Maggi
- Applicant: STMicroelectronics S.r.l. , STMicroelectronics (Malta) Ltd
- Applicant Address: IT Agrate Brianza MT Kirkop
- Assignee: STMicroelectronics S.r.l.,STMicroelectronics (Malta) Ltd
- Current Assignee: STMicroelectronics S.r.l.,STMicroelectronics (Malta) Ltd
- Current Assignee Address: IT Agrate Brianza MT Kirkop
- Agency: Seed IP Law Group PLLC
- Priority: ITTO2013A0446 20130531
- Main IPC: H01L29/84
- IPC: H01L29/84 ; B81B7/00 ; H01L25/065 ; H01L25/00 ; B81B3/00 ; B81C1/00 ; H01L23/00 ; H01L23/31 ; H01L21/56

Abstract:
A wafer-level packaging, comprising: a first semiconductor body integrating a MEMS structure; a second semiconductor body, including a surface electrical-contact region and an ASIC coupled to the MEMS structure and to said electrical-contact region; a first coating layer, made of resin, which englobes and protects the first body, the second body, and the electrical-contact region; at least one first conductive through via, which extends through the first coating layer in an area corresponding, and electrically coupled, to the first electrical-contact region; an electrical-contact pad, which extends over the first coating layer, electrically coupled to the first conductive through via; a third semiconductor body, integrating an electronic circuit, glued on the first coating layer; a second coating layer, made of resin, which englobes and protects the third body; at least one second conductive through via, which extends completely through the second coating layer in an area corresponding, and electrically coupled, to the electrical-contact pad; and a further electrical-contact pad electrically coupled to the second conductive through via.
Public/Granted literature
- US20140353775A1 WAFER-LEVEL PACKAGING OF INTEGRATED DEVICES, AND MANUFACTURING METHOD THEREOF Public/Granted day:2014-12-04
Information query
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