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US09446957B2 Polycrystalline silicon rod and method for producing polysilicon 有权
多晶硅棒及其制造方法

Polycrystalline silicon rod and method for producing polysilicon
Abstract:
Polycrystalline silicon rods produced by the Siemens process produce a higher yield of CZ crystals when the process parameters are modified in a second stage of deposition such that an outer layer of larger crystallites having a mean swize >20 μm is produced. Harvesting of these polycrystalline rods and conventional rods by enclosing them in a plastic bag or sheath prior to removal from the reactor also surprisingly increase the yield of CZ crystals grown from a melt containing the sheathed rods.
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