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US09447205B2 Atmospheric pressure plasma processing of polymeric materials utilizing close proximity indirect exposure 有权
使用近距离间接曝光的聚合材料的大气压等离子体处理

Atmospheric pressure plasma processing of polymeric materials utilizing close proximity indirect exposure
Abstract:
A plasma treatment method that includes providing treatment chamber including an intermediate heating volume and an interior treatment volume. The interior treatment volume contains an electrode assembly for generating a plasma and the intermediate heating volume heats the interior treatment volume. A work piece is traversed through the treatment chamber. A process gas is introduced to the interior treatment volume of the treatment chamber. A plasma is formed with the electrode assembly from the process gas, wherein a reactive species of the plasma is accelerated towards the fiber tow by flow vortices produced in the interior treatment volume by the electrode assembly.
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