Invention Grant
- Patent Title: Aluminum nitride bulk crystals having high transparency to untraviolet light and methods of forming them
- Patent Title (中): 对紫外光具有高透明度的氮化铝块状晶体及其形成方法
-
Application No.: US14687993Application Date: 2015-04-16
-
Publication No.: US09447519B2Publication Date: 2016-09-20
- Inventor: Sandra B. Schujman , Shailaja P. Rao , Robert T. Bondokov , Kenneth E. Morgan , Glen A. Slack , Leo J. Schowalter
- Applicant: Crystal IS, Inc.
- Applicant Address: US NY Green Island
- Assignee: Crystal IS, Inc.
- Current Assignee: Crystal IS, Inc.
- Current Assignee Address: US NY Green Island
- Agency: Morgan, Lewis & Bockius LLP
- Main IPC: C30B23/00
- IPC: C30B23/00 ; C30B23/02 ; H01L21/02 ; C30B29/40 ; C30B33/02 ; C30B35/00

Abstract:
In various embodiments, methods of forming single-crystal AlN include providing a substantially undoped polycrystalline AlN ceramic having an oxygen concentration less than approximately 100 ppm, forming a single-crystal bulk AlN crystal by a sublimation-recondensation process at a temperature greater than approximately 2000° C., and cooling the bulk AlN crystal to a first temperature between approximately 1500° C. and approximately 1800° C. at a first rate less than approximately 250° C./hour.
Public/Granted literature
- US20150218729A1 ALUMINUM NITRIDE BULK CRYSTALS HAVING HIGH TRANSPARENCY TO ULTRAVIOLET LIGHT AND METHODS OF FORMING THEM Public/Granted day:2015-08-06
Information query