Invention Grant
- Patent Title: Integrated time dependent dielectric breakdown reliability testing
- Patent Title (中): 集成时间依赖介质击穿可靠性测试
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Application No.: US13544080Application Date: 2012-07-09
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Publication No.: US09448277B2Publication Date: 2016-09-20
- Inventor: Jifeng Chen , Dirk Pfeiffer , Thomas M. Shaw , Peilin Song , Franco Stellari
- Applicant: Jifeng Chen , Dirk Pfeiffer , Thomas M. Shaw , Peilin Song , Franco Stellari
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Daniel J. Morris
- Main IPC: G01R31/28
- IPC: G01R31/28 ; G01R31/311

Abstract:
Systems for reliability testing include a picometer configured to measure a leakage current across a device under test (DUT); a camera configured to measure optical emissions from the DUT based on a timing of the measurement of the leakage current; and a test system configured to apply a stress voltage to the DUT and to correlate the leakage current with the optical emissions using a processor to determine a time and location of a defect occurrence within the DUT by locating instances of increased noise in the leakage current that correspond in time with instances of increased optical emissions.
Public/Granted literature
- US20140207396A1 INTEGRATED TIME DEPENDENT DIELECTRIC BREAKDOWN RELIABILITY TESTING Public/Granted day:2014-07-24
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