Invention Grant
US09453036B2 Group 11 mono-metallic precursor compounds and use thereof in metal deposition
有权
11族单金属前体化合物及其在金属沉积中的应用
- Patent Title: Group 11 mono-metallic precursor compounds and use thereof in metal deposition
- Patent Title (中): 11族单金属前体化合物及其在金属沉积中的应用
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Application No.: US13468601Application Date: 2012-05-10
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Publication No.: US09453036B2Publication Date: 2016-09-27
- Inventor: Sean Barry , Jason Coyle , Timothy James Clark , Jeffrey J.M. Hastie
- Applicant: Sean Barry , Jason Coyle , Timothy James Clark , Jeffrey J.M. Hastie
- Applicant Address: CA Kingston, Ontario
- Assignee: GreenCentre Canada
- Current Assignee: GreenCentre Canada
- Current Assignee Address: CA Kingston, Ontario
- Agency: Foley & Lardner LLP
- Main IPC: C07F1/00
- IPC: C07F1/00 ; C07F1/08 ; C07F1/10 ; C07F7/10 ; C23C16/18 ; C23C16/455

Abstract:
The present application provides precursor compounds useful for deposition of a group 11 metal on a substrate, for example, a microelectronic device substrate, as well as methods of synthesizing such precursor compounds. The precursor compounds provided are mono-metallic compounds comprising a diaminocarbene (DAC) having the general formula: “DAC-M-X”, where the diaminocarbene is an optionally substituted, saturated N-heterocyclic diaminocarbene (sNHC) or an optionally substituted acyclic diaminocarbene, M is a group 11 metal, such as copper, silver or gold; and X is an anionic ligand. Also provided are methods of synthesizing the precursor compounds, metal deposition methods utilizing such precursor compounds, and to composite materials, such as, e.g., microelectronic device structures, and products formed by use of such precursors and deposition methods.
Public/Granted literature
- US20120323008A1 GROUP 11 MONO-METALLIC PRECURSOR COMPOUNDS AND USE THEREOF IN METAL DEPOSITION Public/Granted day:2012-12-20
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