Invention Grant
- Patent Title: Monomer, polymer, resist composition, and patterning process
- Patent Title (中): 单体,聚合物,抗蚀剂组合物和图案化工艺
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Application No.: US14689392Application Date: 2015-04-17
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Publication No.: US09458144B2Publication Date: 2016-10-04
- Inventor: Takayuki Fujiwara , Masayoshi Sagehashi , Koji Hasegawa , Ryosuke Taniguchi
- Applicant: Shin-Etsu Chemical Co., Ltd.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2014-097364 20140509
- Main IPC: C07D307/92
- IPC: C07D307/92 ; C07D307/20 ; C07D307/32 ; C07D307/33 ; C07D493/10 ; C07D407/12 ; C07D307/94

Abstract:
A monomer (1) is prepared by reacting a compound (9) with a base or metal to form a metal enolate reagent, and reacting the metal enolate reagent with an acyloxyketone compound (8). A polymer derived from the monomer is used as base resin to formulate a resist composition, which is shelf stable and displays a high dissolution contrast, controlled acid diffusion and low roughness in forming positive pattern via alkaline development and in forming negative pattern via organic solvent development.
Public/Granted literature
- US20150322027A1 MONOMER, POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS Public/Granted day:2015-11-12
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