Invention Grant
- Patent Title: Optical spectroscopy device, process of making the same, and method of using the same
- Patent Title (中): 光谱仪器,制造方法及其使用方法
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Application No.: US14987078Application Date: 2016-01-04
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Publication No.: US09459144B2Publication Date: 2016-10-04
- Inventor: Jui Hsieh Lai , Ying-Hao Kuo
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- Main IPC: G01J3/00
- IPC: G01J3/00 ; G01J3/02 ; G01J3/18 ; G01J3/28 ; H01L31/18 ; H01L31/0232 ; G02B6/42 ; H01L27/146

Abstract:
An optical spectroscopy device includes a first cladding layer is positioned over a photodetector. An optical core region is over the first cladding layer where the optical core region is configured to receive a light beam. The optical core region includes a first grating having a first pitch where the first pitch is positioned to direct a first wavelength of the light beam to a first portion of the photodetector. The optical core region further includes a second grating having a second pitch where the second grating is positioned to direct a second wavelength of the light beam to a second portion of the photodetector. The first pitch is different from the second pitch, the first wavelength is different from the second wavelength, and the first portion of the photodetector is different from the second portion of the photodetector. Additionally, a second cladding layer is over the optical core region.
Public/Granted literature
- US20160116335A1 Optical Spectroscopy Device, Process of Making the Same, and Method of Using the Same Public/Granted day:2016-04-28
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