Invention Grant
US09459460B2 Optical image capturing module, aligning method, and observing method
有权
光学图像捕获模块,对准方法和观察方法
- Patent Title: Optical image capturing module, aligning method, and observing method
- Patent Title (中): 光学图像捕获模块,对准方法和观察方法
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Application No.: US14455240Application Date: 2014-08-08
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Publication No.: US09459460B2Publication Date: 2016-10-04
- Inventor: Shi-Wei Lin , Chun-Ming Yang , Chih-Chin Wen , Chorng-Tyan Lin
- Applicant: METAL INDUSTRIES RESEARCH & DEVELOPMENT CENTRE
- Applicant Address: TW Kaohsiung
- Assignee: METAL INDUSTRIES RESEARCH & DEVELOPMENT CENTRE
- Current Assignee: METAL INDUSTRIES RESEARCH & DEVELOPMENT CENTRE
- Current Assignee Address: TW Kaohsiung
- Agency: WPAT, PC
- Agent Justin King; Jonathan Chiang
- Priority: TW102129545A 20130816
- Main IPC: G02B27/10
- IPC: G02B27/10 ; G03F9/00 ; H01L21/68 ; G02B27/14

Abstract:
A method of aligning an upper substrate and a lower substrate is provided. The upper and lower substrates are oppositely arranged, and the aligning method includes the following steps: providing an optical image capturing module; emitting light rays to a third surface of a first prism; filtering the light rays, so that the light rays are divided into light rays at the first wavelength range and light rays at the second wavelength range, wherein the light rays at the first wavelength range irradiate a pattern on the upper substrate, and light rays at the second wavelength range irradiate a pattern on the lower substrate; reflecting a pattern image on the upper substrate to an image capturing apparatus; reflecting a pattern image on the lower substrate to the image capturing apparatus; and determining locations of the patterns of the upper and lower substrate that are on the image capturing apparatus.
Public/Granted literature
- US20150049334A1 OPTICAL IMAGE CAPTURING MODULE, ALIGNING METHOD, AND OBSERVING METHOD Public/Granted day:2015-02-19
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