Invention Grant
- Patent Title: Mechanically produced alignment fiducial method and device
- Patent Title (中): 机械制作对准基准方法及装置
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Application No.: US14207467Application Date: 2014-03-12
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Publication No.: US09459540B2Publication Date: 2016-10-04
- Inventor: Torbjörn Sandström
- Applicant: Micronic Mydata AB
- Applicant Address: SE Taby
- Assignee: Mycronic AB
- Current Assignee: Mycronic AB
- Current Assignee Address: SE Taby
- Agency: Haynes Beffel & Wolfeld LLP
- Agent Ernest J. Beffel, Jr.
- Main IPC: G03B27/42
- IPC: G03B27/42 ; G03F7/20 ; G03F1/42 ; G03F9/00

Abstract:
The technology disclosed relates to methods and systems that can be used to reduce visible artifacts know as mura. In particular, it relates to producing alignment marks by physically modifying appearance of a layer of exposure or radiation sensitive material on a workpiece, then using those alignment marks or transferred direct or inverted images of those marks to realign a writing coordinate system between exposure writing passes, following physical movement of the workpiece within the writing system. The physical modifications described include mechanically pressing a mark into the layer, using a laser to ash or ablate the layer, or applying an ink or other substance to the surface of the laser.
Public/Granted literature
- US20140268088A1 MECHANICALLY PRODUCED ALIGNMENT FIDUCIAL METHOD AND DEVICE Public/Granted day:2014-09-18
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