Invention Grant
- Patent Title: Method and device for evaluating a chip manufacturing process
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Application No.: US14989822Application Date: 2016-01-07
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Publication No.: US09460810B2Publication Date: 2016-10-04
- Inventor: Georg Tempel
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee Address: DE Neubiberg
- Agency: Viering, Jentschura & Partner mbB
- Main IPC: G11C29/00
- IPC: G11C29/00 ; G11C29/04 ; G11C29/42 ; G11C29/44 ; G11C29/56 ; H01L21/66

Abstract:
A method for evaluating a chip manufacturing process is described comprising measuring, for each of a plurality of chips manufactured in a chip manufacturing process, a bit failure rate of the chip, determining a distribution of bit failure rates from the measured bit failure rates; determining a maximum allowed bit failure rate from a given chip failure rate limit, determining a value representing the probability that a chip manufactured in the chip manufacturing process is below the maximum allowed bit failure rate and determining, based on the value, whether the chip manufacturing process is suitable for the chip failure rate limit.
Public/Granted literature
- US20160118141A1 METHOD AND DEVICE FOR EVALUATING A CHIP MANUFACTURING PROCESS Public/Granted day:2016-04-28
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