A laterally diffused MOS (LDMOS) device includes a substrate having a p-epi layer thereon. A p-body region is in the p-epi layer. An ndrift (NDRIFT) region is within the p-body region providing a drain extension region, and a gate dielectric layer is formed over a channel region in the p-body region adjacent to and on respective sides of a junction with the NDRIFT region, and a patterned gate electrode on the gate dielectric. A DWELL region is within the p-body region, sidewall spacers are on sidewalls of the gate electrode, a source region is within the DWELL region, and a drain region is within the NDRIFT region. The p-body region includes a portion being at least one 0.5 μm wide that has a net p-type doping level above a doping level of the p-epi layer and a net p-type doping profile gradient of at least 5/μm.