Invention Grant
- Patent Title: Method of formation of a TI-IGBT
- Patent Title (中): 形成TI-IGBT的方法
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Application No.: US14649553Application Date: 2012-12-06
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Publication No.: US09461116B2Publication Date: 2016-10-04
- Inventor: Yangjun Zhu , Wenliang Zhang , Shuojin Lu , Xiaoli Tian , Aibin Hu
- Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES , SHANGHAI LIANXING ELECTRONICS CO., LTD. , JIANGSU CAS-IGBT TECHNOLOGY CO., LTD
- Applicant Address: CN CN CN
- Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES,SHANGHAI LIANXING ELECTRONICS CO., LTD.,JIANGSU CAS IGBT TECHNOLOGY CO., LTD.
- Current Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES,SHANGHAI LIANXING ELECTRONICS CO., LTD.,JIANGSU CAS IGBT TECHNOLOGY CO., LTD.
- Current Assignee Address: CN CN CN
- Agency: Goodwin Procter LLP
- International Application: PCT/CN2012/086016 WO 20121206
- International Announcement: WO2014/086015 WO 20140612
- Main IPC: H01L29/739
- IPC: H01L29/739 ; H01L21/331 ; H01L21/425 ; H01L21/302 ; H01L29/08 ; H01L29/06 ; H01L29/66 ; H01L21/265 ; H01L29/36 ; H01L21/18

Abstract:
A TI-IGBT, comprising a first semiconductor substrate, a second semiconductor substrate, and a first doped layer; a short circuit region and a collector region disposed in parallel are formed in the first semiconductor substrate; the short circuit region and the collector region have different doping types; the second semiconductor substrate is located on the upper surface of the first semiconductor substrate, and has the same doping type with the short circuit region; the first doped layer is located between the first semiconductor substrate and the second semiconductor substrate, and covers at least the collector region; the first doped layer has the same doping type with the second semiconductor substrate, and has a doping concentration smaller than that of the second semiconductor substrate.
Public/Granted literature
- US20150349102A1 TI-IGBT AND FORMATION METHOD THEREOF Public/Granted day:2015-12-03
Information query
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