Invention Grant
- Patent Title: RTP lamp base with removal features
- Patent Title (中): RTP灯座具有去除功能
-
Application No.: US14252430Application Date: 2014-04-14
-
Publication No.: US09462636B2Publication Date: 2016-10-04
- Inventor: Joseph M. Ranish , Douglas R. McAllister
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: H05B3/00
- IPC: H05B3/00

Abstract:
A lamp device for thermal processing of a substrate is provided. The lamp device includes a bulb enclosing a filament, the filament having a pair of leads. The lamp device further includes a lamp base. The lamp base includes a seal connecting the bulb to the lamp base; a sleeve having one or more walls and two ends with one end surrounding the seal; a potting compound filling the sleeve; one or more wires distributed through the sleeve and the potting compound and coupled to the pair of leads; and one or more hookable features located within 10 mm of the sealing end.
Public/Granted literature
- US20150189697A1 RTP LAMP BASE IMPROVEMENT Public/Granted day:2015-07-02
Information query