Invention Grant
- Patent Title: Adjustment of power and frequency based on three or more states
- Patent Title (中): 基于三个或更多个状态调整功率和频率
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Application No.: US14016841Application Date: 2013-09-03
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Publication No.: US09462672B2Publication Date: 2016-10-04
- Inventor: John C. Valcore, Jr. , Bradford J. Lyndaker
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla Group, LLP
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H05H1/46 ; H03J7/00

Abstract:
Systems and methods for adjusting power and frequency based on three or more states are described. One of the methods includes receiving a pulsed signal having multiple states. The pulsed signal is received by multiple radio frequency (RF) generators. When the pulsed signal having a first state is received, an RF signal having a pre-set power level is generated by a first RF generator and an RF signal having a pre-set power level is generated by a second RF generator. Moreover, when the pulsed signal having a second state is received, RF signals having pre-set power levels are generated by the first and second RF generators. Furthermore, when the pulsed signal having a third state is received, RF signals having pre-set power levels are generated by the first and second RF generators.
Public/Granted literature
- US20140009073A1 Adjustment of Power and Frequency Based on Three or More States Public/Granted day:2014-01-09
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