Invention Grant
- Patent Title: Charged particle beam drawing apparatus
- Patent Title (中): 带电粒子束拉制装置
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Application No.: US14674054Application Date: 2015-03-31
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Publication No.: US09466465B2Publication Date: 2016-10-11
- Inventor: Keita Ideno
- Applicant: NuFlare Technology, Inc.
- Applicant Address: JP Yokohama
- Assignee: NuFlare Technology, Inc.
- Current Assignee: NuFlare Technology, Inc.
- Current Assignee Address: JP Yokohama
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2014-091558 20140425
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/317

Abstract:
A charged particle beam drawing apparatus according to an embodiment includes; a vacuum vessel including a base plate; a stage provided in the vacuum vessel and supporting a sample; a stage movement mechanism provided in the vacuum vessel and moving the stage; a two-dimensional scale provided on a lower surface of the stage; a detection unit disposed under the two-dimensional scale and detecting a position of the stage by using the two-dimensional scale; and a support body supporting the detection unit.
Public/Granted literature
- US20150311036A1 CHARGED PARTICLE BEAM DRAWING APPARATUS Public/Granted day:2015-10-29
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