Invention Grant
US09466536B2 Semiconductor-on-insulator integrated circuit with back side gate
有权
具有背面栅极的绝缘体上半导体集成电路
- Patent Title: Semiconductor-on-insulator integrated circuit with back side gate
- Patent Title (中): 具有背面栅极的绝缘体上半导体集成电路
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Application No.: US14451342Application Date: 2014-08-04
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Publication No.: US09466536B2Publication Date: 2016-10-11
- Inventor: Sinan Goktepeli , Stuart B. Molin , George P. Imthurn
- Applicant: QUALCOMM Incorporated
- Applicant Address: US CA San Diego
- Assignee: Qualcomm Incorporated
- Current Assignee: Qualcomm Incorporated
- Current Assignee Address: US CA San Diego
- Agency: Haynes and Boone, LLP
- Main IPC: H01L21/30
- IPC: H01L21/30 ; H01L21/00 ; H01L21/46 ; H01L21/84 ; H01L21/762 ; H01L21/3213 ; H01L23/48 ; H01L27/12 ; H01L29/786

Abstract:
Methods for manufacturing semiconductor-on-insulator (SOI) integrated circuits are disclosed. An SOI wafer is provided having a first surface and a second surface. The substrate of the SOI wafer forms the second surface. A transistor is formed in the semiconductor layer of the SOI wafer. A handle wafer is bonded to the first surface of the SOI wafer. The substrate layer is then removed to expose a back surface of the buried insulator of the SOI wafer. Conductive material is deposited on the SOI wafer that covers the back surface of the buried insulator. The conductive material is patterned to form a second gate electrode for the transistor on the back surface of the insulator.
Public/Granted literature
- US20140342529A1 Semiconductor-on-Insulator Integrated Circuit with Back Side Gate Public/Granted day:2014-11-20
Information query
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