Invention Grant
US09466614B2 Vertically integrated memory cell 有权
垂直集成的存储单元

Vertically integrated memory cell
Abstract:
A vertically integrated memory cell including a deep trench extending into a substrate, a trench capacitor located within the deep trench, and a vertical transistor at least partially embedded within the deep trench above the trench capacitor, the vertical transistor is in direct contact with and electrically coupled to the trench capacitor.
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