Invention Grant
- Patent Title: Vertically integrated memory cell
- Patent Title (中): 垂直集成的存储单元
-
Application No.: US14289679Application Date: 2014-05-29
-
Publication No.: US09466614B2Publication Date: 2016-10-11
- Inventor: John E. Barth, Jr. , Babar A. Khan
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent L. Jeffrey Kelly; Steven Meyers
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/12 ; H01L21/84 ; H01L29/66 ; H01L27/108

Abstract:
A vertically integrated memory cell including a deep trench extending into a substrate, a trench capacitor located within the deep trench, and a vertical transistor at least partially embedded within the deep trench above the trench capacitor, the vertical transistor is in direct contact with and electrically coupled to the trench capacitor.
Public/Granted literature
- US20150348977A1 VERTICALLY INTEGRATED MEMORY CELL Public/Granted day:2015-12-03
Information query
IPC分类: