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US09466666B2 Localized strain relief for an integrated circuit 有权
集成电路的局部应变消除

Localized strain relief for an integrated circuit
Abstract:
An integrated circuit may include a semiconductor die having a trench formed in a surface of the semiconductor die. One or more circuit components may be formed on the surface of the semiconductor die. The trench can extend into the semiconductor die next to at least one circuit component. The trench may surround the circuit component partially or wholly. The trench may be filled with a material having a lower bulk modulus than the semiconductor die in which the trench is formed.
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