Invention Grant
- Patent Title: Resurf semiconductor device charge balancing
- Patent Title (中): Resurf半导体器件电荷平衡
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Application No.: US14697963Application Date: 2015-04-28
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Publication No.: US09466712B2Publication Date: 2016-10-11
- Inventor: Won Gi Min , Hongzhong Xu , Zhihong Zhang , Jiang-Kai Zuo
- Applicant: FREESCALE SEMICONDUCTOR, INC.
- Applicant Address: US TX Austin
- Assignee: FREESCALE SEMICONDUCTOR, INC.
- Current Assignee: FREESCALE SEMICONDUCTOR, INC.
- Current Assignee Address: US TX Austin
- Agent Sherry W. Schumm
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/06 ; H01L29/08 ; H01L29/10

Abstract:
Breakdown voltage BVdss is enhanced and ON-resistance reduced in RESURF devices, e.g., LDMOS transistors, by careful charge balancing, even when body and drift region charge balance is not ideal, by: (i) providing a plug or sinker near the drain and of the same conductivity type extending through the drift region at least into the underlying body region, and/or (ii) applying bias Viso to a surrounding lateral doped isolation wall coupled to the device buried layer, and/or (iii) providing a variable resistance bridge between the isolation wall and the drift region. The bridge may be a FET whose source-drain couple the isolation wall and drift region and whose gate receives control voltage Vc, or a resistor whose cross-section (X, Y, Z) affects its resistance and pinch-off, to set the percentage of drain voltage coupled to the buried layer via the isolation wall.
Public/Granted literature
- US20150243781A1 RESURF SEMICONDUCTOR DEVICE CHARGE BALANCING Public/Granted day:2015-08-27
Information query
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