Invention Grant
US09466789B2 Method of making a high thermal stability reference structure with out-of-plane anisotropy for magnetic device applications
有权
制造具有磁性器件应用的面外各向异性的高热稳定性参考结构的方法
- Patent Title: Method of making a high thermal stability reference structure with out-of-plane anisotropy for magnetic device applications
- Patent Title (中): 制造具有磁性器件应用的面外各向异性的高热稳定性参考结构的方法
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Application No.: US14511273Application Date: 2014-10-10
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Publication No.: US09466789B2Publication Date: 2016-10-11
- Inventor: Yu-Jen Wang , Witold Kula , Ru-Ying Tong , Guenole Jan
- Applicant: Headway Technologies, Inc.
- Applicant Address: US CA Milpitas
- Assignee: Headway Technologies, Inc.
- Current Assignee: Headway Technologies, Inc.
- Current Assignee Address: US CA Milpitas
- Agency: Saile Ackerman LLC
- Agent Stephen B. Ackerman
- Main IPC: H01L43/12
- IPC: H01L43/12 ; G01R33/09 ; G11B5/39 ; G11B5/66 ; G11B5/84 ; G11C11/15 ; G11C11/16 ; H01F10/32 ; H01F41/30 ; H01L43/02 ; H01L43/08 ; H01L43/10 ; H01F10/12

Abstract:
Enhanced Hc and Hk in addition to higher thermal stability to 400° C. are achieved in magnetic devices by adding dusting layers on top and bottom surfaces of a spacer in a synthetic antiferromagnetic (SAF) structure to give a RL1/DL1/spacer/DL2/RL2 reference layer configuration where RL1 and RL2 layers exhibit perpendicular magnetic anisotropy (PMA), the spacer induces antiferromagnetic coupling between RL1 and RL2, and DL1 and DL2 are dusting layers that enhance PMA. Dusting layers are deposited at room temperature to 400° C. RL1 and RL2 layers are selected from laminates such as (Ni/Co)n, L10 alloys, or rare earth-transition metal alloys. The reference layer may be incorporated in STT-MRAM memory elements or in spintronic devices including a spin transfer oscillator. A transition layer such as CoFeB/Co may be formed between the RL2 reference layer and tunnel barrier layer in a bottom spin valve design.
Public/Granted literature
- US20150056368A1 High Thermal Stability Reference Structure with Out-of-Plane Anisotropy for Magnetic Device Applications Public/Granted day:2015-02-26
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